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Fractional-Order Variable-Gain Super-Twisting Control With Application to Wafer Stages of Photolithography Systems
Fractional-Order Variable-Gain Super-Twisting Control With Application to Wafer Stages of Photolithography Systems
2020
Zhian Kuang
Liting Sun
Huijun Gao
Masayoshi Tomizuka
Keywords:
Optoelectronics
Photolithography
Materials science
Wafer
Correction
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