Electrochemical Micromachining on Different Types of GaAs by Confined Etchant Layer Technique

Jing Tang,Jing Tang,Wen--Hua Wang,wangwenhua,Jin-Liang Zhuang,Jinliang Zhuang,Chen Cui,Chen Cui

Electrochemical Micromachining on Different Types of GaAs by Confined Etchant Layer Technique

2009

Jing Tang
Jing Tang
Wen--Hua Wang
wangwenhua
Jin-Liang Zhuang
Jinliang Zhuang
Chen Cui
Chen Cui

National Natural Science Foundation of China [20873112]; Fund of National Engineering Research Center for Optoelectronic Crystalline Materials of China [2005DC105003]

Keywords:

Inorganic chemistry
Nanotechnology
Chemistry
Etching (microfabrication)
Electrochemistry
Surface micromachining
engineering research center
anodic dissolution
electrochemical micromachining
crystalline materials

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