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Synthesis of hafnium oxide thin films with ion beam assisted deposition
Synthesis of hafnium oxide thin films with ion beam assisted deposition
2001
Takanori Mori
Ippei Shimizu
Rafael R. Manory
Shoji Miyake
mori takanori
Zhishuiyi Ping
miyake masasi
Keywords:
Knoop hardness test
Ion beam-assisted deposition
Scanning electron microscope
X-ray crystallography
Ion beam
Thin film
Analytical chemistry
Materials science
Chemical vapor deposition
X-ray photoelectron spectroscopy
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