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Pitch and Step Height Measurements Using NIST | NIST
Pitch and Step Height Measurements Using NIST | NIST
1997
R Koning
Ronald G. Dixson
Joseph Fu
V W. Tsai
Theodore V. Vorburger
Edwin R. Williams
X.-S. Wang
Keywords:
NIST
Metrology
Optics
Scanning Force Microscope
Materials science
Correction
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