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Chloride-Sensitivity Improvements By Nitrogen Plasma Immersion Ion Implantation On Samarium Oxide Membrane
Chloride-Sensitivity Improvements By Nitrogen Plasma Immersion Ion Implantation On Samarium Oxide Membrane
2013
Yu-Ren Ye
Yu-Hsuan Lin
Chao-Sung Lai
Jer-Chyi Wang
Chun Chang
An-Thung Cho
Jiun-Jye Chang
Min-Feng Chiang
Keywords:
Nitrogen
Plasma-immersion ion implantation
Membrane
Cartography
Chloride
Samarium oxide
Geography
Inorganic chemistry
nitrogen plasma
Materials science
Ion implantation
Immersion (virtual reality)
Correction
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