An acetic acid/water based sol-gel PZT process I: Modification of Zr and Ti alkoxides with acetic acid

The chemical reactions underlying the formation of a water based alkoxide sol gel solution for lead zirconate titanate thin films have been evaluated using infra-red spectroscopy and viscosity measurements. Titanium isopropoxide and zirconium propoxide are modified by acetic acid in order to use water as a solvent. Substitution reactions initially take place with the formation of titanium or zirconium alkoxide acetate and alcohol. The titanium or zirconium alkoxide acetate gradually associate through the formation of M-O-M linkages to increase the viscosity of the solution.