Revisited approach for the characterization of Gate Induced Drain Leakage

This work presents a re-investigation of the electrical characterisation of Gate Induced Drain Leakage (GIDL) [1][2]. The limits of the previously proposed extraction methods are underlined and a new approach is introduced. This new approach enables a better extraction of the GIDL parameters compared to the conventional methods, provided that a new step of electric field extraction is used. Finally, the experimental application of this new approach confirms its ability to quantify the impact of trap assisted tunnelling on GIDL.