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Tuning fork resonator type silicon.

2006 
A silicon resonator (10) of tuning-fork type in which the linear drift of the frequency depending on the temperature is compensated. The resonator includes a base (14) of silicon, a plurality of parallel arms (11, 12, 13) capable of vibrating and actuation means (18, 21, 22); the arm including a silicon layer between two layers of silicon oxide which I'epaisseur, relative to that of the silicon layer, is such as to compensate to first order, the thermal drift of the resonator.
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