Electron spin resonance of technological coatings made of silicon carbide

A high-resolution ESR method (v = 140 GHz) was used in a comparative investigation of powders prepared from 6H-SiC single crystals: a technical powder produced industrially and a powder made from a coating produced under laboratory conditions. An analysis of the nature of the ESR spectra provided information on the polytypic and impurity composition of the powders, on the concentration of the main impurity, and on the degree of compensation of this impurity. The laboratory coating had properties suitable for the preparation of high-quality epitaxial silicon films with a controlled impurity composition when making industrial products coated by silicon carbide