Predictable turn-around time for post tape-out flow
2012
A typical post-out flow data path at the IC Fabrication has following major components of software
based processing - Boolean operations before the application of resolution enhancement techniques
(RET) and optical proximity correctin (OPC), the RET and OPC step [etch retargeting, sub-resolution
assist feature insertion (SRAF) and OPC], post-OPCRET Boolean operations and sometimes in the
same flow simulation based verification. There are two objectives that an IC Fabrication tapeout flow
manager wants to achieve with the flow - predictable completion time and fastest turn-around time
(TAT). At times they may be competing. There have been studies in the literature modeling the turnaround
time from historical data for runs with the same recipe and later using that to derive the
resource allocation for subsequent runs. [3]. This approach is more feasible in predominantly
simulation dominated tools but for edge operation dominated flow it may not be possible especially if
some processing acceleration methods like pattern matching or hierarchical processing is involved. In
this paper, we suggest an alternative method of providing target turnaround time and managing the
priority of jobs while not doing any upfront resource modeling and resource planning. The methodology
then systematically either meets the turnaround time need and potentially lets the user know if it will
not as soon as possible. This builds on top of the Calibre Cluster Management (CalCM) resource
management work previously published [1][2]. The paper describes the initial demonstration of the
concept.
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