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Silicon as a Millimeter-Wave Monolithically Integrated Substrate - A New Look
1981
Keywords:
- Photonic integrated circuit
- Ion implantation
- Secondary ion mass spectrometry
- Electronics
- Electronic engineering
- Analytical chemistry
- Integrated circuit
- Mass spectrometry
- Materials science
- Monolithic microwave integrated circuit
- Silicon
- Substrate (chemistry)
- Electrical engineering
- integrated circuit fabrication
- Extremely high frequency
- Optoelectronics
- Correction
- Source
- Cite
- Save
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