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Optical polishing pitch for continuous polishing of large-aperture laser glass
Optical polishing pitch for continuous polishing of large-aperture laser glass
2013
单海洋 Shan Haiyang
徐学科 Xu Xueke
贺洪波 He Hongbo
易葵 Yi Kui
邵建达 Shao Jianda
Keywords:
Polishing
Laser
Optics
Aperture
Physics
Chemical-mechanical planarization
large aperture
Correction
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