Study on micro-fabrication processes in CoFeB/MgO/CoFeB magnetic tunnel junctions

Hiroki Maehara,Tomoaki Osada,Mihoko Doi,K Sakamoto,Koji Tsunekawa,David D. Djayaprawira,Yoshimitsu Kodaira,Naoki Watanabe,Hitoshi Kubota,Akio Fukushima,Y. Otani,Shinji Yuasa,K. Ando

Study on micro-fabrication processes in CoFeB/MgO/CoFeB magnetic tunnel junctions

2005

Hiroki Maehara
Tomoaki Osada
Mihoko Doi
K Sakamoto
Koji Tsunekawa
David D. Djayaprawira
Yoshimitsu Kodaira
Naoki Watanabe
Hitoshi Kubota
Akio Fukushima
Y. Otani
Shinji Yuasa
K. Ando

The effect of reactive ion etching (RIE) micro-fabrication process using methanol (CH/sub 3/OH) gas on the magnetoresistance properties of CoFeB/MgO/CoFeB magnetic tunnel junctions (MTJs) was investigated in this paper. The result has been compared with that of the MTJs etched with ion-milling method.

Keywords:

Nuclear magnetic resonance
Tunnel magnetoresistance
Ion milling machine
Microfabrication
Reactive-ion etching
Magnetoresistance
Magnetic field
Physics
Methanol fuel
Materials science
Methanol
Lithography
Optoelectronics

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations