magnetron system with armored target holder.

An object of the present invention is to achieve the target, the application and shielding of the isolated area on the end block so as to obtain long processing time with maximum electric power of work and without influence on the use the target material. Therefore there is provided a magnetron system includes an end block which has a target setting device for coupling to a rotation tbulaire shaped target, a holding device for a magnet system disposed within the tubular target and a shield which covers the end of a tubular shape mounted target in the target setting device, the shielding area covering the end of the tubular target being configured such that the annular gap remaining between the tubular target and the shield has at least seen from the outside, part leading radially outward.