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Study of Adsorption of H on Stepped SiC Surface during CVD Growth
Study of Adsorption of H on Stepped SiC Surface during CVD Growth
2021
Tomoya Kimura
Kenta Chokawa
Atsushi Oshiyama
Kenji Shiraishi
Keywords:
surface
Adsorption
Silicon carbide
Materials science
Chemical engineering
Chemical vapor deposition
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