ICP (inductively coupled plasma) processing machine tool cavity air pressure control method based on PLC (programmable logic controller)

The invention discloses an ICP (inductively coupled plasma) processing machine tool cavity air pressure control method based on a PLC (programmable logic controller), and belongs to the technical field of plasma processing machine tools. In order to overcome various defects that reaction gas is directly discharged into the atmosphere by virtue of previous plasma machine tools, the ICP processing machine tool cavity air pressure control method is disclosed aiming at maintaining the stability of machine tool cavity pressure and preventing the pressure change from influencing processing results in a machine tool processing procedure; and after processing, residual reaction gas in a machine tool cavity and gas obtained after reaction can be pumped and discharged; and then further tail gas treatment can be performed to prevent environmental pollution and damages to the health of operators.