A display device, the array substrate and the manufacturing method

2014 
The present invention relates to display technology, and particularly relates to an apparatus and a manufacturing method of the display array substrate. The manufacturing method of the array substrate, the array substrate includes a first thin film transistor and a pixel electrode includes the following steps: forming a buffer layer on the substrate on the substrate after the above steps, the semiconductor material deposition source and drain of a metal material, formed through one patterning process of the first TFT and the active layer pattern source and drain electrodes. The present invention provides an apparatus, and a manufacturing method of the display array substrate, the array substrate by the adjustment of the production process, can shorten the production cycle of the thin film transistor, and because experience fewer processing steps, the thin film transistor can be improved good characteristics, so that the threshold voltage of the thin film transistor is large drift will not occur, while improving the product yield and the stability and reliability of the device is more suitable for long term use.
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