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Novel CMOS structure with polysilicon source/drain (PSD) transistors by self-aligned silicidation
Novel CMOS structure with polysilicon source/drain (PSD) transistors by self-aligned silicidation
1993
Masahiro Shimizu
Takehisa Yamaguchi
Masahide Inuishi
Katsuhiro Tsukamoto
Keywords:
Electronic engineering
Engineering
Transistor
Polysilicon depletion effect
CMOS
Correction
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