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Observation of Planar Defects in 2-inch SiC Wafer
Observation of Planar Defects in 2-inch SiC Wafer
2002
Hideaki Tanaka
Taro Nishiguchi
Makato Sasaki
Shigehiro Nishino
Keywords:
Metallurgy
Sublimation (phase transition)
Micropipe
Wafer
Composite material
Materials science
Temperature gradient
Planar
Correction
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