Research of annular polishing asymmetric ZnS plane window

Due the annular polishing technology for planar optical components do not have the sharp selectivity, annular polishing technology is a very import process to fabricate irregular planar elements which with high precision surface shape and low surface roughness. According to the characteristics of annular polishing, the zns asymmetric plane window annular polishing process and key technical parameters control was researched. In this paper, one pair of asymmetric planar ZnS window parts were machined which diagonal length is 147mm, through technology experiments, obtained process test samples. The surface figures of the plane zns window are measured by a Zygo interferometer and the reflect wavefront P-V value is better than 1.5λ, the reflect wavefront local error rms value is better than 0.05λ (λ=632.8nm). Experiments results demonstrate the effectiveness of annular processing technology was used to manufacture zinc sulfide asymmetric shape plane window.