Scalable behavior modeling for SCR based ESD protection structures for circuit simulation

This paper reports a new scalable behavioral modeling technique for silicon controlled rectifier (SCR) based electrostatic discharge (ESD) protection structures using Verilog-A language. Accurate models were developed for various low-triggering voltage SCR ESD (LVSCR) protection structures implemented in a foundry 180nm RF process, which were validated by circuit simulation and ESD measurement.