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New Monolithic High Solar Rejection EUV Transmission Filter
New Monolithic High Solar Rejection EUV Transmission Filter
2014
Karl Fleury-Frenette
Etienne Renotte
Cedric Lenaerts
Laurence Rossi
Lionel Jacques
Jean-Philippe Halain
Pierre Rochus
Keywords:
Extreme ultraviolet lithography
Electronic engineering
Transmission (mechanics)
Materials science
Optics
Correction
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