Alignment for lithography with polarized light, corresponding use and method for finding the same

An alignment mark (500, 550) disposed on a substrate and comprising three portions (501, 502, 503; 551, 552, 553), wherein a first portion containing (501, 551) and a third portion (503, 553) elements , aligned in a same orientation, wherein a second portion (502, 552) contains elements oriented in an orthogonal orientation relative to elements in the first portion (501, 551) and the third section (503, 553), and wherein elements of the first portion (501, 551), the second portion (502, 552) and the third section (503, 553) sub-elements (507, 512; 557, 562) include, all with the same orientation.