Direction Sensitivity MatrixwithPLLTemperature Sensor

tel. +420-2-2435 2267 Inthepaperthereispresented temperature transducer withPLL signal processing ofsensor data. Theprinciple oftemperature sensor isbased onthe MOS structure behaviour inthetemperature range. Thestrong andweak inversion modesareused. Thereisusedmatrix oftemperature sensors inthe design ofairflowsensor. Various arrangements oftemperature structure are designed. Thenewcircuits design isused. Thelatest knowledge ofmicroelectronic technology isusedatdevelopment ofnew types ofsensors formeasurement ofphysical andbiochemical quantities. Fordesign ofa direction sensitive matrix, theanemometric principle maybeused. Itsoperation isbased on cooling oftemperature sensors ofdifferent type. Sensitivity ofthesensors isderived from temperature equilibrium insteady state, whenelectrical energy delivered tothesensor isthe sameasheat energy lost forcooling ofthesensor. Theenergy loss depends onvelocity offlow ofthecooling medium. Powerdelivered forthesensor heating isusedfortheflowvelocity measurement. Sensors using this principle are"hot-wire" sensors (probe isnotsuitable for integration), thermistors (high sensitivity, notsuitable forintegration). Another group ofsensors using theanemometric principle arep-njunctions (low sensitivity forair velocity), MOS channel (suitable forintegration andminiaturization)