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Determination of silicon content in gallium arsenide by the method of charged-particle analysis
Determination of silicon content in gallium arsenide by the method of charged-particle analysis
1980
A. P. Danilov
R.P. Meshcheryakov
S. V. Popov
E. S. Solodovnikov
B.M. Yakovlev
Keywords:
Ion
Charged particle
Semimetal
Sensitivity (control systems)
Gallium arsenide
Materials science
Analytical chemistry
content
Silicon
Deuterium
Correction
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