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Mechanical and dielectric properties of pure-silica-zeolite low-k materials.
Mechanical and dielectric properties of pure-silica-zeolite low-k materials.
2006
Zijian Li
Mark Johnson
Minwei Sun
E. Todd Ryan
David J. Earl
Wolfgang Maichen
Jeremy I. Martin
Shuang Li
Christopher M. Lew
Junlan Wang
Michael W. Deem
Mark E. Davis
Yushan Yan
Keywords:
Thin film
Dielectric
Silicate
Porous medium
Organic chemistry
Inorganic chemistry
Chemistry
Zeolite
Correction
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