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Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers
2003
Kazutoshi Murata
Naoki Fujioka
Yoshiharu Chinone
Shigehiro Nishino
Keywords:
Crystallite
Metallurgy
Composite material
Materials science
Wafer
Correction
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