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Silicon Anisotropic Etching in Ternary Solution Composed of TΜΑΗ+Triton+NH2ΟΗ
Silicon Anisotropic Etching in Ternary Solution Composed of TΜΑΗ+Triton+NH2ΟΗ
2017
Veerla Swarnalatha
Avvaru Venkata Narasimha Rao
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Keywords:
Ternary operation
Anisotropy
Etching
Silicon
Materials science
Mineralogy
Inorganic chemistry
Chemical engineering
silicon anisotropic etching
Optics
Correction
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