Performances of suspended Silicon Nanowire Resonators for time reference applications

High frequency Silicon NanoWire Resonators (SNWR) have been fabricated and their performances for time reference applications have been assessed. The SNWR have been designed to operate at different frequencies going from 55 MHz up to 300 MHz with quality factors higher than 2000 at room temperature under high vacuum. The measured temperature coefficient of frequency (TCF) for different SNWR is about 40 ppm over a range of temperature going from 4 K to 300 K. The evolution of the quality factor as function of temperature has also been measured as well as the Allan deviation for different nanowire lengths.