Impact of chemical mechanical polishing on the quality factor of Ba 0.5 Sr 0.5 TiO 3 solidly mounted resonator

A voltage activated barium strontium titanate solidly mounted resonator was fabricated and measured. The barium strontium titanate was deposited on a chemical mechanical polished acoustic Bragg reflector with a surface roughness of 0.504nm RMS. Data was collected on the device at a dc bias voltage range of 0V to 25V in 5V increments. The barium strontium titanate solidly mounted resonator showed an effective quality factor of 100 to 180 over the bias range.