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Effects of In Situ Boron Doping in Si Epitaxial Growth on a VIC Processed Poly-Si Seed Layer Using Hot-Wire CVD
Effects of In Situ Boron Doping in Si Epitaxial Growth on a VIC Processed Poly-Si Seed Layer Using Hot-Wire CVD
2011
Seung Mo Kang
Kyung Min Ahn
Changsoo Lee
Seon Hong Mun
Byung Tae Ahn
Keywords:
Nanotechnology
Epitaxy
Boron
Doping
Materials science
Inorganic chemistry
In situ
boron doping
Chemical engineering
Correction
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