Fabrication of terahertz wire-grid polarizers

Wire-grid polarizers for terahertz region were fabricated by manufacturing triangular grating using a ruling-based, ultraprecision diamond machining process and replicating the pattern into polymethylpentene (TPX) and cyklo-olefin copolymer (COC) sheets using hot embossing. On top of the imprinted structures, aluminum was evaporated in an oblique angle, forming an aluminum wire grid. The achieved extinction rate was over 150 for TPX polarizers and near 1000 for COC polarizers.