Alternative metals for advanced interconnects
2014
We discuss the selection criteria for alternative metals in order to fulfill the requirements necessary for interconnects at half pitch values below 10 nm. The performance of scaled interconnects using transition metal germanides and CoAl alloys as metallization are studied and compared to conventional Cu and W interconnects.
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
3
References
49
Citations
NaN
KQI