53.2: 30″ AMOLED Based on Sequential Lateral Solidification Process

An excimer-laser-based two-shot sequential lateral solidification (TS-SLS) process has been developed to fabricate 30” FHD (1920×RGB×1080) AMOLED TVs using both 2D projection and line-scan SLS systems. We have optimized (1) the microstructure of TS-SLS processed polycrystalline materials, (2) the geometry of driving TFTs to minimize non-uniformity of the pixel brightness and (3) the off-bias TFT aging process to reduce the leakage current. This result verifies that the TS-SLS process can be utilized to make large area AMOLED TVs without any laser related mura.