Mechanical and thermal properties of Si/SiO2 narrow-band mid-infrared filters for space applications

Anna Sytchkova,Bill Baloukas,Oleg Zabeida,Angela Piegari,Jolanta-Ewa Klemberg-Sapieha,Maria Luisa Grilli,Ludvik Martinu

Mechanical and thermal properties of Si/SiO2 narrow-band mid-infrared filters for space applications

2019

Anna Sytchkova
Bill Baloukas
Oleg Zabeida
Angela Piegari
Jolanta-Ewa Klemberg-Sapieha
Maria Luisa Grilli
Ludvik Martinu

The residual stress compensation of Si/SiO2 narrow-band filters for the mid-infrared range, composed of a combination of a Fabry-Perot and a blocking filter, is studied.

Keywords:

Optoelectronics
Infrared
Thermal
Thin film
Residual stress
Materials science
narrow band
mid infrared

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