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Electrochemical Behavior and Analysis of Organic Additives in Cobalt Damascene Baths
Electrochemical Behavior and Analysis of Organic Additives in Cobalt Damascene Baths
2016
Michael Pavlov
Danni Lin
Eugene Shalyt
Xiaodong Yan
Keywords:
Nanotechnology
Electrochemistry
Cobalt
Copper interconnect
Inorganic chemistry
Chemistry
Correction
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