Characterization of HMDS treated CVD graphene

Chemical Vapor Deposition (CVD) is a choice growth technique to mass produce graphene over large areas. Residues from transfer processes involving polymeric supporting membranes however lead to unwanted doping and affect the quality of the graphene film. Using Raman spectroscopy it is shown that a Hexamethyldisilazane (HMDS) surface treatment leads to improved electrical properties.