Old Web
English
Sign In
Acemap
>
Paper
>
Characteristics of Palladium Doped Amorphous Carbon Films Fabricated by Unbalanced Magnetron Sputtering System
Characteristics of Palladium Doped Amorphous Carbon Films Fabricated by Unbalanced Magnetron Sputtering System
2021
Yong-Seob Park
Young Baek Kim
Sung Hwan Hwang
Jaehyeong Lee
Keywords:
Sputter deposition
Optoelectronics
Materials science
Amorphous carbon
Doping
Palladium
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]