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Structure and Damage of Silicon Modified by Means of Thin Films Ion Assisted Deposition
Structure and Damage of Silicon Modified by Means of Thin Films Ion Assisted Deposition
2007
I.S. Tashlykov
Sergey Mikhailovich Baraishuk
O. M. Mikhalkovich
I. P. Antonovich
Игорь Серафимович Ташлыков
Сергей Михайлович Барайшук
Олег Михайлович Михалкович
И. П. Антонович
Keywords:
Chemical engineering
Surface modification
Deposition (chemistry)
Thin film
Materials science
Ion
Silicon
Correction
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