Binary chemical nanopatterns: fabrication and use as templates for electrostatic self-assembly

A versatile method to produce sub-50 nm patterned monolayers on silicon substrates is demonstrated, by combining nanolithography with gas phase silanation. These patterns may serve to control and direct the assembly of macromolecules at the nanoscale, as demonstrated by the growth of polyelectrolyte multilayers on such binary patterned substrates.