Method for regulating the reactive gas flow in the reactive plasma-assisted vacuum deposition processes

Method for regulating the reactive gas flow in the reactive plasma-assisted vacuum deposition processes, in which a control variable, which is determined by a plasma of the vacuum-coating process, is detected from the vacuum chamber as a controlled system by means of optical spectroscopy in a measuring element and is processed in an electronic controller such that corresponding to a control deviation supplied to the vacuum coating process amount of a reactive gas is adjusted as a manipulated variable, the control variable is a calculated value from a measured value of the intensity of a spectral line of the particle of the process involved coating material (3) and a measured value of the intensity of a spectral line of the particle of the reactive gas (6), characterized that the measured value of the intensity of the spectral line of the particle as a function of the electronic excitation of the particles is corrected.