Corrections to “Design, Optimization, and Realization of a High Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer”

2021 
In the above article [1] , the content of this article remains untouched. Only Table III is rectified. The stiffness of the proposed MOEMS accelerometer listed in Table III should be half of that value, which is 0.56 N/m.
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    1
    References
    0
    Citations
    NaN
    KQI
    []