Old Web
English
Sign In
Acemap
>
Paper
>
Record High EUV Efficiency from Multilayer-Coated Liquid-Overcoated Blazed Ion-Etched Gratings
Record High EUV Efficiency from Multilayer-Coated Liquid-Overcoated Blazed Ion-Etched Gratings
2002
Michael P. Kowalski
R. G. Cruddace
Jack C. Rife
Troy W. Barbee
William R. Hunter
Klaus Heidemann
Holger Kierey
Keywords:
Materials science
Optoelectronics
Ion
Extreme ultraviolet lithography
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]