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Anisotropy of Side-etching Rate in Electrochemical Etching of 4H-SiC
Anisotropy of Side-etching Rate in Electrochemical Etching of 4H-SiC
2015
Naoto Yamashita
Keywords:
Anisotropy
Dry etching
Composite material
Reactive-ion etching
Etching (microfabrication)
Electrochemistry
Etching
Microelectromechanical systems
Materials science
electrochemical etching
etching rate
Optoelectronics
Correction
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