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Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
Investigation on molybdenum and its conductive oxides as p-type metal gate candidates
2007
Zilan Li
Tom Schram
T. Witters
Hag Ju Cho
Barry O'Sullivan
Jacob Hooker
Stefan De Gendt
Kristin De Meyer
Keywords:
Type metal
Molybdenum
Inorganic chemistry
Materials science
Electrical conductor
Metal gate
Correction
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