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CVD-Al/Flow-Al Technology for Filling Large Aspect Ratio Contact Holes
CVD-Al/Flow-Al Technology for Filling Large Aspect Ratio Contact Holes
2003
Manabu Sakamoto
Tomoharu Aoki
Kazuya Masu
Se-Ju Lim
Masanobu Hatanaka
Michio Ishikawa
Yuji Furumura
Keywords:
Composite material
Materials science
large aspect ratio
Flow (psychology)
Correction
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