Observation of low-energy electrons transmission through periodic arrays micro-pattern silicon window

This paper describe a new kind of electron transmission window (ETW) with periodic arrays micro-pattern and one-dimensional nanostructure, which is fabricated by microfabrication and chemical etching from a 500 ± $10~\mu \text{m}$ -thick n-type Si wafer. The arrays field emission electrode (AFEE) is produced to emit well focused electrons, which is powered by nanosecond-pulse voltage (the absolute value ≤8.5KV). The ETW shows the transmission ability for low-energy electrons verified by transmission performance analysis and visualization diagnosis.