Old Web
English
Sign In
Acemap
>
Paper
>
Quantitative correlation of the metastable defect in Cz-silicon with different impurities
Quantitative correlation of the metastable defect in Cz-silicon with different impurities
2003
Rein
Diez
Falster
Glunz
Keywords:
Metastability
Annealing (metallurgy)
Boron
Photoconductivity
Analytical chemistry
Etching (microfabrication)
Impurity
Vacancy defect
Silicon
Materials science
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]