Formation of thermochemical laser-induced periodic structures on titanium films in a nitrogen-rich atmosphere

Recently, highly regular thermochemical laser-induced periodic surface structures (TLIPSS) have become the subject of active studies. TLIPSS are formed in the interference maxima due to the local oxidation of the material irradiated with ultrashort laser pulses and are characterized by the elevation of the relief that forms parallel oxide protrusions. The gas surrounding is expected to affect the morphology and chemical composition of the resulting TLIPSS; however, such effects were rarely studied so far. Here we present the results of the TLIPSS fabrication on glass-supported Si-Ti bilayer films using an astigmatic Gaussian IR femtosecond beam both in air and a nitrogen-rich atmosphere. The formation of ordered TLIPSS with the period of ≈ 920 nm is observed at slow scanning speeds (∼1 μm/s) and low fluences in a nitrogen-rich atmosphere. Raman spectroscopy revealed the presence of TiO2 (rutile) peaks, as well as bands centered at 280 cm-1 and 320 cm-1, which can be related to TiN in amorphous and polycrystalline phase.