MEMS device with two different internal pressures
2015
It is proposed a method for producing a micromechanical component with a substrate and with a connected to the substrate and a first cavity enclosing the substrate cap, wherein in the first cavity, a first pressure prevails, and a first gas mixture is included with a first chemical composition , in which - a first cavity with an environment of the micromechanical component connecting access opening is formed in the substrate or in the cap in a first method step, wherein - in a second method step, the first pressure and / or the first chemical composition is adjusted in the first cavity, wherein - in a third method step, the access opening is closed by the introduction of energy or heat into an absorbent part of the substrate or the cap by means of a laser, wherein a reversible getter is introduced for further adjusting the first pressure and / or the first chemical composition in the first cavern temporally before the third step.
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